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发明名称
THICKNESS VIBRATOR
摘要
申请公布号
JPS6063973(A)
申请公布日期
1985.04.12
申请号
JP19840157491
申请日期
1984.07.30
申请人
HITACHI SEISAKUSHO KK
发明人
SADAMURA SHIGERU;TAKEUCHI HIROYUKI;ITOU YUKIO;NAGATSUMA KAZUYUKI;ASHIDA SAKICHI
分类号
C04B35/46;H01L41/18;H01L41/187
主分类号
C04B35/46
代理机构
代理人
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