| 摘要 |
PURPOSE:To make it possible to easily perform the control and teaching of a robot by detecting a work with high accuracy by a miniaturized apparatus, by embedding a non-contact sensor in the leading end part of an actuator supported in a freely protruding and sinking state by a support member. CONSTITUTION:A piston 20 and a hollow columnar actuator 22 threaded with the male screw part 20c of said piston are inserted into the cylinder chamber 16 of a support member 15 in a freely slidable manner and the actuator 22 is pushed down by air from an air supply port 25. A non-contact sensor 23 is embedded in the leading end of the actuator 22. Therefore, the sensor 23 and the actuator 22 are integrated to miniaturize a sensor apparatus and, because the detection point of the sensor 23 and the acting point of the actuator 22 are coincided, the control and teaching of a robot is easy when both of them are attached to the robot and a work can be detected with high accuracy in such a state that the detection surface of the sensor 23 is allowed to approach the work and, by preventing the adhesion of dust to the sensor 23 by injecting air from a ring shaped groove 28, the accuracy of the sensor 23 can be enhanced. |
