| 摘要 |
PURPOSE:To provide a waveguide with more control electrodes by forming a low-resistance area selectively on the surface of an insulating semiconductor substrate, and providing an optical waveguide layer made of a semiconductor having a different conduction type from the low-resistance areas thereupon. CONSTITUTION:When a voltage is applied between an upper control electrode 6 and an ohmic electrode for the low-resistance area, the resistance on the low- resistance area 9 is varied by selecting the crystal azimuth of the semiconductor properly. An insulating substrate is used for this semiconductor substrate 11 to insulate the control electrode 10 electrically from the substrate 11 or other electronic elements formed thereupon, e.g. a low-resistance area, light emitting element, etc., formed near-by similarly, enabling the formation of a large-scale optical integrated circuit. |
