发明名称 Semiconductor radiation detector having a heat-insulated suspension
摘要 The actual detector a radiation detector element (2) is made of semiconductor material and was originally a subregion of the substrate (10) on which said detector element (2) is mounted only by means of an oxide film (4). <IMAGE>
申请公布号 DE3333410(A1) 申请公布日期 1985.04.11
申请号 DE19833333410 申请日期 1983.09.15
申请人 SIEMENS AG 发明人 KOEDER,OTTMAR,DIPL.-ING.
分类号 G01J5/20;(IPC1-7):H01L31/00 主分类号 G01J5/20
代理机构 代理人
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