| 摘要 |
PURPOSE:To detect a microcrack in a semiconductor vessel by visually observing a different between the times when a volatile solvent mainly comprising alcohol or fluorocarbon volatilizes from a microcrack section and a plane by projecting oblique rays. CONSTITUTION:When a predetermined volatile solvent 2 is applied on the surface of a vessel to be tested and the solvent is heated up to a point close by the boiling point of the solvent 2 and volatilized, the volatile solvent 2 generally remains in a crack section. Since reflectivity and reflection angles to oblique rays 5 differ in a normal section 3 in ceramics 1 as the surface of the vessel and the crack sections 4, in which the solvent 2 remains, at that time, reflected rays 6, 7 are generated, and the cracks 4 are detected easily by a visual observation. |
