| 摘要 |
PURPOSE:To miniaturize and simplify a spare chamber for carrying a wafer by mounting covers on the inside and outside of an opening section in a vacuum chamber. CONSTITUTION:An upper cover 8 is pushed against an opening section from an upper section by a cylinder 5, and a vacuum chamber 1 is sealed and evacuated. A wafer 6 carried by a belt 4 from the outside is received in a lower cover 9, the lower cover is pushed against the opening section from a lower section by a cylinder 5, and a spare chamber formed by the covers 8 and 9 is evacuated. The upper cover 8 is opened after an evacuation, and the wafer 6 is carried into the vacuum chamber 1 by a belt 4. According to the constitution, a gate valve is unnecessitated, manufacture is facilitated, and a device is miniaturized. |
