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发明名称
VAKUUMFUEHRUNG FUER INTERFEROMETRISCHE MESSSYSTEME
摘要
申请公布号
DD221008(A1)
申请公布日期
1985.04.10
申请号
DD19830257306
申请日期
1983.11.30
申请人
VEB CARL ZEISS JENA,DD
发明人
STEINBACH,MANFRED,DD
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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