| 摘要 |
PURPOSE:To improve the reliability of a vertical head as well as the production yield of a main magnetic pole for vertical magnetic recording head, by forming parallel magnetic fields on the surface of a substrate and deciding as desired the direction of the magnetic anisotropy of an obtained magnetic thin film of high permeability. CONSTITUTION:A yoke plate (''Permalloy'') 8 made of a material of high permeability and magnets 9 and 9' are distributed to a substrate holder 6, and a substrate 7 is set at the center between both magnets. Here the polarities of both magnets 9, 9' are set opposite to each other to obtain a line of magnetic force 10 on the substrate 7 as shown by a figure (c), and parallel and intensive magnetic fields are generated on the surface of the substrate 7. Then a ''Permalloy'' film is formed on the substrate 7 by a sputtering process by means of the holder 6. A magnetization facilitating axis is set in the direction 11 of the parallel magnetic fields; while a magnetization unfacilitating axis is set in the direction 12 orthogonal to the direction 11. Thus it is possible to form a magnetic thin film of high permeability which has the magnetic anisotropy in the desired direction. In this way, the reliability of magnetic characteristics of a main magnetic pole is improved as well as the production yield of the magnetic pole. |
