发明名称 MATERIAL EVALUATING DEVICE
摘要 PURPOSE:To evaluate various electronic materials by detecting a transient photoconduction phenomenon due to pulse light excitation while varying the measurement temperature of a sample continuously. CONSTITUTION:The sample 2 to be measured which is put in a sample cavity 1 is excited with pulse light from a light source 3. The transient photoconduction phenomenon due to the pulse light excitation is detected by a microwave photoconduction measuring device A equipped with a temperature control part 6 capable of a continuous temperature sweep. The sample 2 is cooled temporarily and then brought under the temperature control of the temperature control part 6 to rise in temperature continuously, measuring the transient photoconduction phenomenon on real-time basis. A time-series electric signal regarding the transient photoconduction phenomenon is outputted from the measuring device A and supplied to a waveform processor B for waveform processing. Thus, various electronic materials are evaluated.
申请公布号 JPS6060543(A) 申请公布日期 1985.04.08
申请号 JP19830168808 申请日期 1983.09.13
申请人 KONISHIROKU SHASHIN KOGYO KK 发明人 HARADA TETSUYA;OOTANI HIROSHI;SUZUKI JIYUNKO
分类号 G01N21/00;G01N22/00;H01L21/66 主分类号 G01N21/00
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