发明名称 |
MATERIAL EVALUATING DEVICE |
摘要 |
PURPOSE:To evaluate various electronic materials by detecting a transient photoconduction phenomenon due to pulse light excitation while varying the measurement temperature of a sample continuously. CONSTITUTION:The sample 2 to be measured which is put in a sample cavity 1 is excited with pulse light from a light source 3. The transient photoconduction phenomenon due to the pulse light excitation is detected by a microwave photoconduction measuring device A equipped with a temperature control part 6 capable of a continuous temperature sweep. The sample 2 is cooled temporarily and then brought under the temperature control of the temperature control part 6 to rise in temperature continuously, measuring the transient photoconduction phenomenon on real-time basis. A time-series electric signal regarding the transient photoconduction phenomenon is outputted from the measuring device A and supplied to a waveform processor B for waveform processing. Thus, various electronic materials are evaluated. |
申请公布号 |
JPS6060543(A) |
申请公布日期 |
1985.04.08 |
申请号 |
JP19830168808 |
申请日期 |
1983.09.13 |
申请人 |
KONISHIROKU SHASHIN KOGYO KK |
发明人 |
HARADA TETSUYA;OOTANI HIROSHI;SUZUKI JIYUNKO |
分类号 |
G01N21/00;G01N22/00;H01L21/66 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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