| 摘要 |
PURPOSE:To prevent a damage from being caused and optical characteristics from deteriorating by providing an optical reflecting mirror, a holding member fixed on the back surface of the optical reflection mirror in one body, and a temperature controller which circulates fluid after temperature control through the holding member. CONSTITUTION:The optical reflection mirror 1 is fixed to the finned holding member 3 to sufficient contacting area with good heat conductivity. The member 3 is provided with projections or fins so that heat is easily exchanged. The fluid supplied from the temperature controller after temperature control flows on the surface of the member 3 where the projections are formed. Further, a temperature sensor 7 is fitted to the reflection mirror 1 and the controller 8 controls the temperature of the fluid flowing through it by using the sensor 7. A fixing member 2 fixes the reflection mirror 1 at an accurate position. The member 2 fixes the member 3, but the member 2 may fixes the reflection mirror 1 directly. In this case, no inclusion is required to fix the reflection mirror 1, so the position precision is improved.
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