| 摘要 |
PURPOSE:To provide the titled apparatus capable of surely preventing the deterioration of an ion exchange resin at low cost, constituted so as to supply an ion exchange resin stored in a state immersed in high purity water into a bomb, from which air is excluded, by high purity water through an ejector. CONSTITUTION:High purity water W is sent to an ejector 2 from a hermetically closed container 1 through a water supply pipeline 4 with a pump 3 and the ion exchange resin R stored in high purity water W within a container 5 is pumped up to be sent into a bomb 8 for preparing high purity water through an emitting pipeline 7, which is connected to a raw water supply port 8a by a connector 9, along with high purity water W. The high purity water W in the bomb 8 is transferred to the tank 1 through a high purity water recovery pipeline 11, which is connected to a high purity water outtake port 8c by a connector 10, by utilizing pressure difference of the hermetically closed tank 1 evacuated by a vacuum pump 12 through an air-water separator 13 and the above mentioned bomb 8. In addition, air in the bomb 8 is evacuated by the vacuum pump 12 to prevent the adhesion of various germs to the ion exchange resin R in the bomb 8. |
