| 摘要 |
PURPOSE:To shrink the housing state of a wafer and rapidly transfer by placing plural cassettes on an index, picking up each wafer in the casettes by a chucking jig, removing one of every two wafers and inserting another wafer between these wafers in a comb teeth type jig and transferring the comb teeth type jig on the index for loading a quartz boat again using the chucking jig. CONSTITUTION:On an index 1 for indexing cassettes, plural cassettes 2 which house semiconductor wafers are placed and one of every two wafers in the cassettes 2 is housed in combined comb teeth type jigs 9 and 10 using a wafer chucking jig 7 driven by a servo-motor 4, a ball screw 5 and a pulse motor 6. Repeating the same operation, another wafer is inserted between the previous wafers and the comb teeth type jig filled with the wafers is transferred on an index 12 to make a quartz boat 11 which has a half number of cassettes 2. |
