发明名称 |
Three plate, silicon-glass-silicon capacitive pressure transducer. |
摘要 |
<p>A three plate silicon-glass-silicon capacitive pressure transducer includes a conductive silicon diaphragm and substrate relatively spaced by a dielectric body having disposed therein a central electrode positioned between the diaphragm and substrate to form a pressure responsive capacitance with the diaphragm at a value inversely proportional to a pressure signal applied to a pressure sensing surface of the diaphragm.</p> |
申请公布号 |
EP0136249(A2) |
申请公布日期 |
1985.04.03 |
申请号 |
EP19840630125 |
申请日期 |
1984.08.28 |
申请人 |
UNITED TECHNOLOGIES CORPORATION |
发明人 |
GRANTHAM, DANIEL HARRISON;SWINDAL, JAMES LOYCE |
分类号 |
G01L13/02;G01L9/00;G01L9/12;H04R19/04;(IPC1-7):G01L9/12 |
主分类号 |
G01L13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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