| 摘要 |
PURPOSE:To prevent the dissipation of laser energy through a pattern film to improve the practical effect of energy, and to correct a fine pattern by small energy by foring a layer having low thermal conductivity between the pattern film on a photo-mask and a precipitated complex. CONSTITUTION:A Ta complex resin layer 14 and an Ag-Ta complex layer 15 are formed on the whole surface of a photo-mask 10 in which a predetermined pattern shape is formed on the surface of a transparent glass substrate 11 by a chromium film 12. When laser beams 16 are projected, the Ag-Ta complex layer 15 absorbs laser energy, Ag is precipitated to form an Ag precipitating layer 17 on a flake defect 13, the optical transmission of the flake defect 13 is corrected, and an accurate photo-mask pattern is obtained. A direct transmission over the chromium film 12 of laser energy projected to the Ag-Ta complex layer 15 is inhibited by the Ta complex resin layer 14 having low thermal conductivity, and the greater part of laser energy fed are utilized effectively for precipitating Ag. |
