| 摘要 |
PURPOSE:To adjust exposure timing, and to improve the efficiency of exposure by using a crystal monochromator as an X-ray shutter while reducing the number of bunches to one or several in X-ray exposure by synchrotron orbit radiation. CONSTITUTION:A ceramic pressure transducer 8 is pasted on the end section of a crystal monochromator 7, fixed pressure is applied to the crystal monochromator 7, Bragg's conditions are changed, and X-ray beams are brought to ON- OFF states at ultraspeed. The intervals of pulse beams are brought to approximately 500nsec under the state of the acceleration of one bunch 3 arranged on an electron storage ring 1, a peak current value is also brought to several hundred or several thousand times as large as several hundred bunches, and exposure, timing thereof is conformed, to the movement of a silicon wafer 6, and the shortening of exposure time are enabled. The acceleration of one bunch can be realized easily by collecting electrons in one period in acceleration frequency by utilizing a sub-harmonic buncher. |
