| 摘要 |
PURPOSE:To make extremely small foreign matter harmless by forming a thin film of adhesive material on the internal surface of a metallic frame, and sticking the extremely small foreign matter to the adhesive material fixedly when the extremely small mixed foreign matter is suspended between a pericle film and a transparent substrate. CONSTITUTION:The thin film of adhesive material is formed on the internal surface of the metallic frame previously. When the extremely small foreign matter sealed between the pericle film and transparent substrate is suspended, the extremely small foreign matter is made harmless, and the transparent substrate covered with the pericle film is positioned in an electric field to attract the extremely small foreign matter to the metallic frame by Coulomb force and stick it to said adhesive material fixedly, thus making the extremely small foreign matter harmless. Namely, suspended small foreign bodies 10a-10h sealed mixedly in the space 6 between the transparent substrate 1 and pericle film 5 move irregularly as shown by arrows, but contact the thin adhesive film 9 to some probability with time. The contacting foreign bodies are caught by adhesion once contacting the thin adhesive film 9 and fixed as shown in a figure (b). |
