| 摘要 |
PURPOSE:To polish a workpiece to have a strain-less mirror surface by providing a means for applying a certain force to a support plate in the direction of separating from a polishing plate and immersing the workpiece in polishing liquid. CONSTITUTION:A support plate 2 for holding a workpiece 1 is secured fixedly to a flange 4 the other end of which is connected to a piston 5. The piston 5 together with a weight 6 constitutes a U-shaped pipe 8 through fluid 7 to apply a certain force in the direction of arrow 9. Also, the workpiece 1 is immersed in polishing liquid 11 filling a tank 10. When a polishing plate 12 is rotated in the direction of arrow 13, the relative speed is produced between the plate 12 and the workpiece 1 and flow of the liquid 11 is produced in a gap 14 between the workpiece 1 and the plate 12. When the relative speed is increased, pressure in the gap 14 is reduced to lessen the gap 14. And when the rotation of the plate 12 is stopped, the relative speed between the workpiece 1 and the plate 12 is lost. Thus, the workpiece can be polished to have the strain-less mirror surface. |
