发明名称 |
Method for making thin film electroluminescent rare earth activated zinc sulfide phosphors |
摘要 |
A method of coactivating a rare earth activated, electroluminescent zinc sulfide film with activator gas is described. The phosphor film is deposited upon a substrate by co-sputtering from a zinc sulfide target and a rare earth target in an atmosphere such as hydrogen, chlorine, fluorine or bromine, and an inert gas.
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申请公布号 |
US4508610(A) |
申请公布日期 |
1985.04.02 |
申请号 |
US19840584178 |
申请日期 |
1984.02.27 |
申请人 |
GTE LABORATORIES INCORPORATED |
发明人 |
FREEMAN, EVA C.;BAIRD, DONALD H. |
分类号 |
C23C14/06;H01L33/00;H05B33/10;H05B33/14;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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