| 摘要 |
PURPOSE:To suppress outflow of argon gas of the arc plasma light source and stabilize the light source by using a glass having many capillary holes as a window for extracting the light of argon arc plasma light source. CONSTITUTION:Many capillary holes 2 are arranged in parallel in the thickness direction at the center of glass to be used as a window for extracting the light of argon arc plasma light source. Therefore, since flow rate of argon gas flowing through the capillary holes 2 is proportional to the fourth power of inner diameter of capillary holes for the gas of atmospheric pressure, flow of argon gas can be lowered suddenly by making small the inner diameter of capillary holes 2. The inner diameter and length of these capillary holes 2 of this porous glass 1 are determined depending on the application condition of argon arc plasma light source. |
