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经营范围
发明名称
ETCHING DEVICE
摘要
申请公布号
JPS6056075(A)
申请公布日期
1985.04.01
申请号
JP19830162920
申请日期
1983.09.05
申请人
TOSHIBA KK
发明人
HIRAYAMA KAZUNARI
分类号
H01J9/14;C23F1/08;H01J9/02;H01J29/07
主分类号
H01J9/14
代理机构
代理人
主权项
地址
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