| 摘要 |
PURPOSE:To obtain higher throughput by providing a turn table for supporting and shifting samples to be drawn whose rotation is combined with the linear movement of the center of its rotation. CONSTITUTION:Electron beams 4 focussed by electronic lenses 5 and 6 scan over samples 2 to be drawn, in cooperation with a deflecting power source 11, a deflecting coil 8 and a deflecting plate 9. At the same time, the elctron beams 4 are turned ON and OFF by a blanking plate 7 operated by the signals from the power source 10. A large number of samples 2 set on the circumference of a turn table 1 are drawn only in the width of electrostatic deflection 14 during one rotatin of the turn table 1 in the direction R. During another rotation, the turn table 1 is slightly shifted in the direction X by the width of the electrostatic deflection 14. Thus, the drawn region of the sample proceeds from 12 to 13 as the turn table 1 rotates. In such a manner, the samples can be shifted finitely and smoothly without any intermittent actions, and moreover, several tens of samples can be drawm at the same time. |
