摘要 |
PURPOSE:To enhance corrosion resistance, processability and processing accuracy of an ink jet nozzle by covering a tantalum oxide thin film on at least the tip end face of a tantalum ink nozzle, among the tip end face and the inner surface of the jet port of the ink nozzle. CONSTITUTION:An ink jet nozzle is formed by covering a 3mum thick TaO5 thin film 6 by anodic oxidation on the tip end face 5 of an ink nozzle 4 formed by drilling a 200mum diameter conical ink guide hole 2 and a 40mum-diameter and 40mum length ink jet port 3 in a round ink nozzle plate 1 of tantalum, having a thickness of 0.3mm. and a diameter of 10mm.. Also, by another method, an ink jet nozzle is formed by coving a 3mum-thick TaO5 thin film 6 by anodic oxidation on the tip end face 5, the ink guide hole 2, and the inner surface of the jet port 3 of the ink nozzle 4. |