| 摘要 |
PURPOSE:To enable the mass-production of quartz glass plate having high flatness, by manufacturing a thick dry gel by the sol-gel process from a metal alkoxide, and slicing the dry gel. CONSTITUTION:Ethyl silicate is hydrolyzed with an aqueous solution of hydrochloric acid, mixed with fine silica powder, dispersed uniformly, and adjusted to 4-6pH. The obtained sol is poured into a deep vessel having flat bottom, and gelatinized and dried under shrinkage to obtain a thick dry gel. The thick dry gel is sliced to a plurality of flat dry gel plates having the required thickness, and the sliced plates are sintered to obtain a plurality of flat quartz glass plates at the same time. Since the dry gel prepared by this process has large thickness, an easily sliceable thick gel having high flatness and resistant to warpage in drying can be produced. |
