MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19830162160-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS6054812(A)	申请公布日期	1985.03.29
申请号	JP19830162160	申请日期	1983.09.02
申请人	MITSUBISHI DENKI KK	发明人	URAKAWA KAZUYA
分类号	H01L21/301;B28D5/00;H01L21/78	主分类号	H01L21/301
代理机构		代理人
主权项
地址

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