摘要 |
PURPOSE:A carrier gas containing a carbon compound, an organosilicon compound and hydrogen sulfide is heated to achieve high-efficiency production of carbon fibers by the vapor phase growth process. CONSTITUTION:The inside of the reactor tube 38 is replaced with N2 gas by purging it fed from bomb 12 through by-path 44. Then, H2 from bomb 10, as a carrier gas, is sent to the generator 28 containing a carbon compound such as benzene and the other generator 32 containing an organosilicon compound such as diethylsilane. The resultant carrier gas is combined with hydrogen sulfide gas from bomb 14, then sent to the reactor 38 where the gas is heated with an electric furnace 50 at about 700-1,300 deg.C to allow carbon fibers to grow in vapor phase. |