| 摘要 |
PURPOSE:To enhance the reliability of a circuit substrate by covering by covering an electrode pattern formed on an insulating substrate with an anodic oxidized film and an interlayer insulating film when forming a drive circuit substrate of a liquid crystal display unit which includes a thin film transistor array and a multilayer wiring structure, thereby effectively avoiding an interlayer shortcircuit of the multilayer wirings. CONSTITUTION:A Ta film is deposited on a glass substrate 21, patterned, and gate electrode and address lines 221 of a thin film transistor of the first electrode wirings, and one electrode and a ground line 222 of a capacitor are formed. Then, an SiO2 film 23 which operates as a gate insulating film of a transistor and an interlayer insulating layer of wirings is covered on the overall surface, a pinhole 26 is opened at the film 23 disposed on the line 222, and the exposed line 222 surface is altered to an anodic oxidized film 27 with oxidized solution of boron. Then, an amorphous Si film 24 is formed through the film 23 on the line 221, a source electrode and data line 251 is mounted on one end, and a drain electrode and capacitor electrode 252 is mounted on the other end while contacting the film 27. |
