| 摘要 |
PURPOSE:To improve the operability and workability of a bonding arm by providing an inert gas supplying unit which injects to the periphery at the end extended from a capillary of a bonding wire in the arm. CONSTITUTION:An inert gas injecting mechanism 9 is composed of a tubular unit 7a, a cylindrical portion 7b integral with the unit 7a, and an inert gas supplying passage 8a provided in a bonding arm 8. According to this structure, the arm 8 can be reduced in size and weight to improve the operability and the workability, it is not oxidized when forming a bulb 8a for bonding, and the bonding characteristics are not deteriorated. |
