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发明名称
VERFAHREN ZUR BESTIMMUNG DER STRAHLUNGSRESISTENZ VON MIS-STRUKTUREN
摘要
申请公布号
DD220459(A1)
申请公布日期
1985.03.27
申请号
DD19830258400
申请日期
1983.12.22
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
MENNIGER,JOHANN,DD;RAIDT,HELMUT,DD
分类号
H01L21/263;H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/263
代理机构
代理人
主权项
地址
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