发明名称 |
Dry process for forming metal patterns on a surface. |
摘要 |
<p>The process for forming a desired metal pattern on a substrate (35) comprises forming a mask of a thermally depolymerizable polymer (40) on the substrate (35) with a pattern of openings (70) complementary to the desired metal pattern, blanket coating the substrate (35) and the mask (40) with a metal (60), heating the substrate (35) to depolymerize the depolymerizable polymer (40), cooling the surface of the metal (60) to thereby delaminate the metal coated in areas where thermally depolymerizable polymer (40) is present, removing the delaminated metal where necessary, and optionally plasma etching the depolymerized polymer, if residue thereof remains, to remove the same from said substrate. </p> |
申请公布号 |
EP0134938(A2) |
申请公布日期 |
1985.03.27 |
申请号 |
EP19840107435 |
申请日期 |
1984.06.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANDERSON, HERBERT RUDOLPH, JR.;ARAPS, CONSTANCE JOAN;LOTSKO, CATHERINE AGNES |
分类号 |
H01L21/302;H01L21/28;C23C14/04;G03F7/039;G03F7/36;H01L21/3065;(IPC1-7):H01L21/312;H01L21/00;G03F7/02 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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