发明名称 TESTING STRUCTURE FOR MARK OF SEMICONDUCTOR CHIP AND METHOD OF MARKING SAME
摘要 Test structure for identifying semiconductor chips (1) in relation to at least two specified characteristics, consisting of at least one contact area pair disposed on the chip surface with the contact areas (2, 3), with a parallel network (4) electrically containing at least two electronic devices (14) connected in parallel, and two conductors (5) which each connect an end of the parallel network (4) to one of the two contact areas (2, 3) and also a process for identifying semiconductor chips using test structures according to the invention. <IMAGE>
申请公布号 JPS6053044(A) 申请公布日期 1985.03.26
申请号 JP19840157143 申请日期 1984.07.27
申请人 SIEMENS SCHUCKERTWERKE AG 发明人 GIYUNTAA SHINDORUBETSUKU
分类号 H01L21/02;B07C5/34;H01L23/544 主分类号 H01L21/02
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