发明名称 |
Method for production of semiconductor devices |
摘要 |
A method for producing semiconductor devices having a substrate, element fabrication areas formed in the substrate and isolation areas surrounding the element fabrication areas. The method comprises forming a thermal strain absorbing layer on the top surface of the element fabrication areas, forming at least one groove in an area which is to become the isolation areas, inlaying an insulator in the at least one groove, and annealing the insulator to make the density thereof uniform.
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申请公布号 |
US4506434(A) |
申请公布日期 |
1985.03.26 |
申请号 |
US19820414803 |
申请日期 |
1982.09.03 |
申请人 |
FUJITSU LIMITED |
发明人 |
OGAWA, TETSUYA;TOYOKURA, NOBUO |
分类号 |
H01L29/78;H01L21/285;H01L21/31;H01L21/324;H01L21/74;H01L21/76;H01L21/762;H01L21/768;(IPC1-7):H01L21/76;H01L21/302;H01L21/20 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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