DEVICE FOR MEASURING CONCENTRATION OF AMMONIA AND HYDROGEN PEROXIDE IN AMMONIACAL HYDROGEN PEROXIDE LIQUID

摘要

PURPOSE:To obtain a device which measures simultaneously and continuously the concn. of ammonia and hydrogen peroxide in an ammoniacal hydrogen peroxide washing liquid by a simple technique without sampling a specified amt. of the washing liquid by providing a discharge port to a part of a pipe which circulates the washing liquid by gaseous nitrogen into a tank and providing a capillary tube for sampling of a mass spectrometer in the discharge pipeline connected to the discharge port. CONSTITUTION:A washing liquid tank 2 contg. an ammoniacal hydrogen peroxide washing liquid is kept at 60-80 deg.C. The washing liquid in the tank 2 circulates in an air pump 1. The top end of a pipe 5 for blowing gaseous nitrogen in hermetically sealed and a hole 3 is opened thereto. The washing liquid is lifted in the pipe of the air pump 1 by the gaseous nitrogen blown from the hole 3 and is discharged to a washing liquid discharge port 6 side. The gaseous nitrogen is discharged through a strainer 7 and the ammonia, hydrogen peroxide and steam in the washing liquid evaporate into the gas consisting essentially of the gaseous nitrogen during this time. The gas is conducted through a capillary tube 8 to mass spectrometer 9 and the concn. of ammonia and hydrogen peroxide is determined quantitatively by the spectrometer 9.