| 摘要 |
PURPOSE:To provide a titled monitor mirror which enables continuous monitoring of the melting condition of a vapor deposition state by the constitution in which a disk mirror provided behind a frame body having a window facing the melt of the vapor deposition source is rotated from the outside of a vacuum bell- jar device. CONSTITUTION:A disk mirror 12 of a wide area screwed 16 to a revolving shaft 13 is disposed universally rotatably behind a frame body 10 which is provided with a rectangular window 11 forming an optical path for monitoring the melt of a vapor deposition source and consists of a stainless steel, etc. in a vacuum bell- jar 6 of a vacuum bell-jar device provided with the melt for vapor deposition. The mirror 12 is rotated by operating a knob 19 provided on the outside of the bell-jar 6 via a revolving shaft 13, bevel gears 15, 16, 18, etc. to dispose the fresh reflecting surface in the above-mentioned window 11 part according to need so that the melt of the vapor deposition source can be continuously monitored. The easy exchange of the mirror 12 is made possible by the above-mentioned screw 16. |
