| 摘要 |
PURPOSE:To smoothly transport the wafers having different sizes in mixed state by detecting the size of a wafer in the upstream part of a wafer transportation part and automatically varying the width of the guides on the both sides of the wafer transportation part on the basis of the result of the detection. CONSTITUTION:When a wafer 17 in a magazine 16 whose height can be adjusted by an elevator 14 is pushed onto a table 10 by a pusher 15, a stopper 12 is lowered at the same time. Then, the wafer 17 is attached onto the stopper 12 and positioned in the centered state. In this state, a suction hole 13b at the position opposed to the edge of the wafer 17 is detected by a vacuum sensor 13, and when the diameter D of the wafer 17 is obtained, a servomotor 7 is properly driven by the output, and a screw shaft 6 is revolved by a prescribed amount. Therefore, the width between the movable guides 4 and 4 on the both sides is adjusted through female screw members 8a and 8b. Then, the wafer 17 is transported onto an air conveyor 2 after the stopper 12 is raised. |
