| 摘要 |
PURPOSE:To lessen the consumption quantity of mixed gas by a method wherein the title device is constituted in such a structure as to perform gas exchange trace quantity by trace quantity while the pressure of mixed gas in a vacuum container is continuously being held constant. CONSTITUTION:Vacuum pumps 6a and 6b are annexed to a vacuum container 1, which constitutes the carbonic acid gas laser oscillator as a component, and at the same time, a pressure detector 12, which detects pressure in the vacuum container 1, and electromagnetic valves 10a-10c, which are controlled by the detector 12 are provided. At the initial stage of operation, the atomospheric gas in the container 1 is exhausted by the pump 6a, and after that, mixed gas is introduced in through the valve 10c. The charging pressure to the container 1 is watched by the detector 12 and when the charging pressure reached the target pressure, the valve 10c is closed. While laser oscillation is in action, the pump 6b starts, the valves 10a and 10b are opened and new mixed gas is replenished small quantity by small quantity. When the charging pressure reached the upper limit value, the valve 10b is closed and when the pressure reached the lower limit pressure value according to the exhausting speed of the pump 6b, the valve 10b is again opened. Thereafter, this operating process is repeated. |
