发明名称 Method of manufacturing a layer of semiconductor material comprising a step of annealing
摘要 The method of the invention comprises three steps: a first step consisting in covering the layer 1 of semiconductor material with a layer 3 of solid electrolyte, a second step during which the surface of the semi-conductor material layer is cleaned by carrying out the reduction of oxides 2 which form on this surface, through the solid electrolyte layer 3 and a third step during which the layer 1 of semiconductor material is annealed by exposure to a beam of coherent radiation. Application in particular to the manufacture of semiconductor devices comprising an implanted gallium arsenide layer. <IMAGE>
申请公布号 FR2552266(A1) 申请公布日期 1985.03.22
申请号 FR19830014694 申请日期 1983.09.15
申请人 THOMSON CSF 发明人 DIDIER PRIBAT
分类号 H01L21/268;H01L21/311;H01L21/324;(IPC1-7):H01L21/324 主分类号 H01L21/268
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