| 摘要 |
PURPOSE:To enable high accuracy positioning without imparting adverse influences on a converged magnetic field by using a piezoelectric element which expands and contracts according to the strength of impressed voltage, and by using a non-magnetic material as a constituent material as much as possible. CONSTITUTION:A sample is carried onto a sample table in the state of the descent of a Z table 60 and held and fixed by an electrostatic chuck. Next, the table 60 is raised up to a fixed position by rotation of a drive motor 80. At this position, the inclination of the sample to a photoelectric mask is set within an allowable value by driving the drive member consisting of the combination of piezoelectric elements of an Xtheta table 40 and a Ytheta table 50. While keeping this state, the table 60 is raised up to the second fixed position. At this position, the correction in the directions of X, Y, and theta is made by driving each drive member consisting of the piezoelectric element of an X-Ytheta table 20. Besides, the constituent materials of a guide, a sample base, and each table 20, 40, 60 are made of non-magnetic substance. |
