| 摘要 |
PURPOSE:To make it possible to perform quick computation, by assigning the scanned data from the surface of a sample, to a divided mesh. and setting a flaw mesh, which is continued along a specified coordinate axis with respect to the flaw mesh including the flaw data as an element. CONSTITUTION:Frame memories 71a and 71b, a search control part 72, an interface control part 73, a processing part 74, a switch SW, and a signal line 70 are provided. Scanning light 4 is converted into a mesh signal and transferred. The frame memories 71a and 71b are buffered by the switching of the switch SW, and the signal is stored in a unit of one detecting region 100. The data stored in the frame memories 71a and 71b is the data, whose unit is a mesh. A defective mesh is extracted out of the meshes by the search control part 72. The reference data for judging the mesh is obtained and transferred to the processing part 74 by the interface part 73. Thus the shape of the flaw is judged. |
