Measuring system based on the triangulation principle for the dimensional inspection of an object.

摘要

An apparatus for the rapid and accurate dimensional inspection of an object. In particular, the apparatus is adapted for the acquisition of object range data. The apparatus includes a source for emitting a slender beam of radiation, first beam guide means (2) for causing the beam to impinge on a desired spot P of the object under inspection, second beam guide means (4,5) for causing radiation reflected from the spot of impingement on a linear radiation-sensitive detector (6,7)

A preferred embodiment includes third beam guide means for causing radiation reflected from the spot of impingement to traverse a further path also leading to the detector.

The second and third beam guide means are structurally different from each other in such a manner that one and the same object spot irradiated by the beam portion is imaged on the detector as two separate, focussed spots spaced a fixed distance from each other. Thereby a reliable discrimination can be made between true and false reflections from the object under inspection.