| 摘要 |
<p>The invention relates to a micropump (1) comprising at least two valves (10,12) and at least one displacing member (11), said valves and said displacing member being piezo-electrically controllable. A prior art pump of that type is based on a known principle, namely the use of an inlet-valve and an outlet-valve to be opened and closed selectively, and a displacing member. The valves as well as the displacing member are in the form of so-called bimorphs or monomorphs positioned on an e.g. metal diaphragm, i.e. piezo-electrically controllable elements. The invention has amongst other for its purpose to provide the possibility to make a micropump in fully integrated form. In order to realize the above objectives the invention first of all provides a micropump of the type mentioned in the preamble, according to the invention being characterized in that the valves (10,12) and the displacing member (11) are the same in form, connected in series in a channel (3,8,9) and being functionally controllable for obtaining a peristaltical displacing of the fluid to be pumped through said channel.</p> |
