| 摘要 |
PURPOSE:To attain to detect the position of a small diameter hole at a high speed, by collating reflected signals obtained when the relative positional relation of an object to be measured, in which the detection of a center position in one axis direction is stored, and an ultrasonic wave transmitting and receiving element is changed to detect an imaginary center position in the other axis direction. CONSTITUTION:In a first process, the intensities of the reflected signals including the intensity of the reflected signal from the center position of objective matter 54, when the relative positional relation of an ultrasonic wave transmitting receiving element 53 and the matter 54 is changed, are preliminarily stored. In a second process, the relative positional relation of the element 53 and the matter 54 is changed and the min. value of the reflected signal intensity from the matter 54 obtained by transmitting and receiving an ultrasonic wave by the element 53 is detected to detect the center position of the matter 54 in one axis direction. Further, in a third process, the min. values of the reflected signal intensities of the first process and that of the second process and collated to detect the imaginary center position of the matter 54 in the other aixs direction and, in a fourth process, the second and third processes are performed at least two or more times and a position, where the obtained imaginary center position in the other axis direction is coincided, is detected to detect the center position of the matter 54. |
