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发明名称
CONTROLLED EXPOSURE
摘要
申请公布号
GB2100453(B)
申请公布日期
1985.03.20
申请号
GB19820011674
申请日期
1982.04.22
申请人
HITACHI LTD;ZEISS JENA CARL VEB
发明人
分类号
H05K3/00;G03B27/02;G03F7/20;H01L21/30;(IPC1-7):G03B27/00
主分类号
H05K3/00
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