| 摘要 |
A micropositioning stage is described which may be monolithic and which comprises a first structure which is mounted coplanar with and concentrically within a second structure. Both structures consist essentially of frames and pivoting lever arms which respond to linear force from piezoelectric transducers to move an object mounted on a platform in two different directions one of which may be at right angles to the other. The invention is particularly characterized by permitting biaxial movement of an object in a planar, essentially flat unit. In one embodiment, the present invention is monolithic in the sense that it is a single unitary structure except for the piezoelectric transducer elements.
|
