| 摘要 |
A test probe employing a buckling beam array for testing integrated circuits. A pair of identical sets of guides are positioned on either side of a centerpost to align the buckling beams. In one embodiment the holes in one set of guides is offset by a key to induce prebow in the beams. In another embodiment prebow is induced by a floating asymmetric separator positioned on the centerpost between the guide sets. When a force is applied to the probe, the beams deflect in the direction but to different extents so that a uniform force is applied to the surface of the IC irrespective of variations in height.
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