MULTIPLE-LAYER MONOCHROMETER AND APPARATUS USING SAID METER

摘要

PURPOSE:To obtain a multilayer monochrometer diffracting soft X-rays and to observe topographically a crystal surface by forming a super lattice structure consisting of two kinds of semiconductor crystal layers alternately grown in order on a substrate crystal. CONSTITUTION:A multilayer monochrometer element 11 consisting of super lattice structure growing epitaxially and alternately an AlAs layer 7 and a GaAs layer 6 is formed on the layer 6. The soft X-rays 9 emitted from a radiating source 8 are made incident slantly on the element 11 at a prescribed angle through an incident slit 10, the diffracted light is made incident on a sample 14 through a reflecting slit 13, and the reflected light from the surface layer is made incident on a detector 16. The topographic images to an overall surface of the sample 14 is photographed by moving a sample base 15 by a synchronous scanning apparatus 17.