| 摘要 |
PURPOSE:To simplify adjustment by arranging magnetic lenses and electrostatic lenses on the optical axis of an ion source device serving as both an ion gun and an electron gun while arranging plural analytical devices so as to watch a sample on the irradiation point thereof. CONSTITUTION:Magnetic lenses 21, 22 and electrostatic lenses 31, 32 are arranged on an optical axis A of a duoplasmatron 1 of an ion source serving as both an ion gun and an electron gun in order to irradiate the same spot of a sample S by means of an ion beam and an electron beam. Further, an energy analyzer 4 is provided so as to watch the point of intersection O of the surface of the sample S and the optical axis A for getting an Auger electron detection signal through an electron detector 5 while arrangeing an X-ray spectroscope consisting of a spectrocrystal 7 and an X-ray detector 8 in the position for watching the point of intersection O. Accordingly, as two kinds of beams are radiated on the same point of the sample S, the adjustment is simplified thus making it possible to perform complex analysis with enhanced utilization rate of a space. |
