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发明名称
PROCESSO PER LA FABBRICAZIONE DI PELLICOLE ISOLANTI PRIVE DI IRREGOLARITA SPERFICIALI
摘要
申请公布号
IT1067421(B)
申请公布日期
1985.03.16
申请号
IT19760026264
申请日期
1976.08.13
申请人
IBM CORP
发明人
分类号
C04B41/87;C23C14/02;C23C14/06;C23C14/08;C23C14/34;C23C14/40;G11B5/31;H01L21/31;H01L43/02;(IPC1-7):H01B/
主分类号
C04B41/87
代理机构
代理人
主权项
地址
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