| 摘要 |
PURPOSE:To obtain a linear lead-in device having a smoothly moving mobile member, being small in its size and easily controlled for automatic feed, by performing drive of a shifting plate by means of a cylindrical cam arranged around a bellows. CONSTITUTION:A bellows 33 vacuum sealing flexible in the arrow 32 direction, is attached to a flange 31. A shifting plate 34 is welded to the other end of said bellows 33. Said shifting plate 34 is guided by a guide 35 while being shifted inside a cylindrical cam 36 in the arrow 32 direction. A groove 37 is worked on the cylindrical surface of the cylindrical cam 36, while plural pins 38 attached to the shifting plate 34 enter said groove. The cylindrical cam 36 is guided by a bearing 41, while rotation drive of the cylindrical cam 36 is performed by a helical gear 42 fixed on the cylindrical cam 36 and a worm 44 attached to a motor 43 rotating in the arrow 45 direction. |
