| 摘要 |
PURPOSE:To prevent the cooling system from being broken by a method wherein a valve to be used for relieving pressure made to rise by boiling of a cooling agent in the cooler is provided. CONSTITUTION:An ion laser tube 1 made to rise to a high temperature by arc discharge is cooled by pouring a cooling agent. When a pump 9 stops its action from one cause or another, a flow meter 11 detects the abnormality and flashes an alarm signal. By this alarm signal, the arc discharge of the laser tube 1 stops, and at the same time, a valve 12 acts and makes pressure made to rise by boiling of the cooling agent relieve into a tank 13 and the pressure is stored in the tank 13. As a result, the cooling system is prevented from being broken, and at the same time, when the ion laser device is again actuated, any necessity to supply the cooling agent released due to pressure rising is eliminated. |
