| 摘要 |
PURPOSE:To enable to always recognize accurately the irradiating position to the processing point of invisible laser beams by a method wherein visible laser beams are made to pass through the hole of an output coupling mirror and the visible laser beams are made to concentrically superpose on the invisible laser beams. CONSTITUTION:An output coupling mirror 13 is provided in the interior of a first oscillator 10, which outputs CO2 laser beams. The mirror 13 has a hole 14 in the central part thereof, makes infrared laser beams L1 convert into annular beams there and makes the annular beams output from the hole 14, while visible laser beams L2, which are made to output from a second laser oscillator 16, pass through the hole 14 and are superposed, for example concentrically, on the beams L1. The superposed beams L1 and L2 are reflected by a reflector 17 for adjustment, are furthermore reflected by a reflector 18 for transmission and are projected to a matter 20 to be processed. A plural number of transmitting holes 21 have been provided by boring with the reflector 18. The beams L2, which passed through the holes 21, are detected by optical detectors 23a and 23b and if the beams L2 get off from the irradiating point having been set as an object of the beams L2, an output signal is obtained from a differential amplifier 24. By this signal, the reflection angle of the reflector 17 is adjusted. |
